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Excimer laser peeling equipment Product List

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Excimer laser ablation device LD12

A room temperature, laser-based wafer detachment device compatible with wafer sizes up to 300mm.

■ This is a wafer detachment device necessary for the transport/process of thin wafers. ■ It supports various wafer sizes up to 300mm, using room temperature and laser-based wafer detachment.

  • Sensors
  • Memory
  • Excimer laser peeling equipment

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